The CFC facility also has a clean room equipped with thin-film material deposition equipment, like the following:

  • Molecular Beam Epitaxy Deposition System MBE Basement
  • Magnetron Sputtering System Magnetron sputtering system
  • Spin Coater Spin Coater
  • Wire Bonding Wire Bonding
  • Mask Aligner Mask Aligner
  • Non-Reactive ion Etcher Plasma Etching